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Y. Zhou
Y. Zhou
Technische Universität Darmstadt
Chemical vapor deposition
Amorphous solid
Trimethylsilyl
Inorganic chemistry
Analytical chemistry
2
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55
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Deposition Temperature Effect on the Structure and Optical Property of RF-PACVD-Derived Hydrogenated SiCNO Film
2006
Materialwissenschaft Und Werkstofftechnik
Y. Zhou
Xue Hua Yan
Edwin Kroke
Ralf Riedel
Daniel Probst
A. Thissen
Ralf Hauser
Marcus Ahles
H. von Seggern
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Citations (6)
Development of PE-CVD Si/C/N:H films for tribological and corrosive complex-load conditions
2005
Surface & Coatings Technology
Daniel Probst
Holger Hoche
Y. Zhou
Ralf Hauser
T. Stelzner
Herbert Scheerer
E. Broszeit
Christina Berger
Ralf Riedel
Herbert Stafast
E. Koke
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Citations (49)
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