Old Web
English
Sign In
Acemap
>
authorDetail
>
Lev A. Seidman
Lev A. Seidman
Materials science
Optoelectronics
Plasma-enhanced chemical vapor deposition
deposition process
algan gan
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Effect of PECVD SiNx deposition process parameters on electrical properties of SiNx/AlGaN/GaN structures
2021
Modern Electronic Materials
Kira L. Enisherlova
Lev A. Seidman
Ella M. Temper
Yuliy A. Kontsevoy
Show All
Source
Cite
Save
Citations (0)
1