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Effect of PECVD SiNx deposition process parameters on electrical properties of SiNx/AlGaN/GaN structures
Effect of PECVD SiNx deposition process parameters on electrical properties of SiNx/AlGaN/GaN structures
2021
Kira L. Enisherlova
Lev A. Seidman
Ella M. Temper
Yuliy A. Kontsevoy
Keywords:
Materials science
Optoelectronics
Plasma-enhanced chemical vapor deposition
deposition process
algan gan
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