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X. Zhao
X. Zhao
Auburn University
Optics
Electron scattering
Effective method
Beam (structure)
Shot noise
1
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6
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Dependency analysis of line edge roughness in electron-beam lithography
2015
Microelectronic Engineering
X. Zhao
Soo-Young Lee
Jung-Hwan Choi
Suk-joo Lee
Ilgyou Shin
C.-U. Jeon
Byung Gook Kim
Hee-Kwun Cho
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Citations (6)
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