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Shintaro Fukami
Shintaro Fukami
Laser
Plasma
Polydimethylsiloxane
Extreme ultraviolet lithography
Materials science
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Micromachining of PDMS for microfluidics using laser produced plasma EUV radiation
2016
The Japan Society of Applied Physics
Hikari Urai
Mizuki Ogawa
Shintaro Fukami
Shuichi Torii
Tetsuya Makimura
Daisuke Nakamura
Akihiko Takahashi
Tatsuo Okada
Hiroyuki Niino
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Microfabrication of through holes in PDMS sheets using laser plasma EUV light
2016
The Japan Society of Applied Physics
Hikari Urai
Mizuki Ogawa
Shintaro Fukami
Tetsuya Makimura
Hiroyuki Niino
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