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Microfabrication of through holes in PDMS sheets using laser plasma EUV light
Microfabrication of through holes in PDMS sheets using laser plasma EUV light
2016
Hikari Urai
Mizuki Ogawa
Shintaro Fukami
Tetsuya Makimura
Hiroyuki Niino
Keywords:
Laser
Plasma
Microfabrication
Polydimethylsiloxane
Extreme ultraviolet lithography
Materials science
Optics
Optoelectronics
Correction
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