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Yutaro Nakamura
Yutaro Nakamura
Saga University
Atomic physics
Plasma
Chemistry
Analytical chemistry
Sputtering
2
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2
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Rotational cross-shaped magnetized radio-frequency sputtering plasma source for uniform circular target utilization
2017
Journal of Vacuum Science and Technology
Tsubasa Ide
Md. Amzad Hossain
Yutaro Nakamura
Yasunori Ohtsu
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