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Daniel A. Babbs
Daniel A. Babbs
Materials science
Nanotechnology
lithography process
Environmental protection
Business
3
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2024
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Development of imprint materials for the Step and Flash Imprint Lithography process
2004
Frank Y. Xu
Nicholas A. Stacey
Michael P. C. Watts
Van N. Truskett
Ian M. Mcmackin
Jin Choi
Philip D. Schumaker
Ecron Thompson
Daniel A. Babbs
Sidlgata V Sreenivasan
C. Grant Willson
Norman E. Schumaker
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Substratausrichtvorrichtung for a substrate carrier and substrate carrier
1996
Daniel A. Babbs
Richard E Schultz
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Housing and transportation as well as for substrates Ankoppelungsvorrichtung
1995
Daniel A. Babbs
Richard E. Shultz
John Van Strien
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