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Development of imprint materials for the Step and Flash Imprint Lithography process
Development of imprint materials for the Step and Flash Imprint Lithography process
2004
Frank Y. Xu
Nicholas A. Stacey
Michael P. C. Watts
Van N. Truskett
Ian M. Mcmackin
Jin Choi
Philip D. Schumaker
Ecron Thompson
Daniel A. Babbs
Sidlgata V Sreenivasan
C. Grant Willson
Norman E. Schumaker
Keywords:
Materials science
Nanotechnology
lithography process
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