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Scott Arthur Mcdonald
Scott Arthur Mcdonald
University of Texas at Austin
Polymer
Photolithography
Lithography
Dissolution
Fluorocarbon
2
Papers
2
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0
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Dissolution inhibitors for 157-nm microlithography
2002
Will Conley
Daniel Miller
Charles R. Chambers
Brian P. Osborn
Raymond J. Hung
Hoang Vi Tran
Brian C. Trinque
Matthew J. Pinnow
Takashi Chiba
Scott Arthur Mcdonald
Paul Zimmerman
Ralph R. Dammel
Andrew R. Romano
C. Grant Willson
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Compositions de photoréserve développable par voie sèche et méthode d'utilisation
1992
Nicholas J. Clecak
Willard Earl Conley
Ranee Wai-Ling Kwong
Leo L. Linehan
Scott Arthur Mcdonald
Harbans Singh Sachdev
Hubert Schlosser
Carlton Grant Willson
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