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D. Lafond
D. Lafond
French Alternative Energies and Atomic Energy Commission
Scanning electron microscope
Ion beam
Ion
Integrated circuit
Analytical chemistry
4
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38
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Mechanism of Thermal Silicon Oxide Direct Wafer Bonding
2009
Electrochemical and Solid State Letters
C. Ventosa
Christophe Morales
L. Libralesso
Frank Fournel
A. M. Papon
D. Lafond
Hubert Moriceau
J. D. Penot
F. Rieutord
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Citations (37)
Observation of submicronic contacts and vias by scanning ion and electron microscopy
1994
R. Pantel
G. Mascarin
J. P. Gonchond
D. Lafond
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Observation of submicronic contacts and vias by scanning ion and electron microscopy
1994
Quality and Reliability Engineering International
R. Pantel
G. Mascarin
J. P. Gonchond
D. Lafond
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Citations (1)
Observation of submicronic contacts and vias by scanning ion and electron microscopy
1994
R. Pantel
G. Mascarin
J. P. Gonchond
D. Lafond
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