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Observation of submicronic contacts and vias by scanning ion and electron microscopy
Observation of submicronic contacts and vias by scanning ion and electron microscopy
1994
R. Pantel
G. Mascarin
J. P. Gonchond
D. Lafond
Keywords:
Scanning electron microscope
Ion beam
Ion
Integrated circuit
Analytical chemistry
Optics
Electron microscope
Chemistry
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