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Scott Scales
Scott Scales
Organic chemistry
Polymer
Photochemistry
Outgassing
Bilayer
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Modified Acetal Approach to 157nm Resist Design
2002
Journal of Photopolymer Science and Technology
Sanjay Malik
Stephanie Dilocker
Jeff Eisele
Binod De
Murrae J. Bowden
Scott Scales
John Hatfield
Andrew J. Blakeney
Plamen Tzviatkov
Tadayoshi Kokubo
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