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Yuki Nakagomi

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Ion composition analysis of Deep Oscillation Magnetron Sputtering (DOMS) using a reflectron time-of-flight mass spectrometer

2021 The Japan Society of Applied Physics
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Discharge Time Analysis in High Power Pulsed Magnetron Sputtering

2021 The Japan Society of Applied Physics
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Ionic composition analysis of high-power pulsed magnetron sputtering using a reflectron-type time-of-flight mass spectrometer

2020 The Japan Society of Applied Physics
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Pulse and power controls in modulated pulsed power magnetron sputtering and the optical emission spectroscopy

2019 The Japan Society of Applied Physics
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