Old Web
English
Sign In
Acemap
>
Paper
>
Pulse and power controls in modulated pulsed power magnetron sputtering and the optical emission spectroscopy
Pulse and power controls in modulated pulsed power magnetron sputtering and the optical emission spectroscopy
2019
Yuki Nakagomi
Tatsuya Watabe
Mutsuki Hirayama
Ryosuke Kaneyuki
Nobuo Nishimiya
Masaomi Sanekata
Hiroaki Yamamoto
Masahide Tona
Keizo Tsukamoto
Keijiro Ohshimo
Fuminori Misaizu
Keywords:
Pulsed power
Sputter deposition
Plasma diagnostics
Optoelectronics
Pulse (signal processing)
Emission spectrum
Materials science
optical emission spectroscopy
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]