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C. Dubarry
C. Dubarry
Materials science
Sputtering
Dielectric
Thin film
Annealing (metallurgy)
9
Papers
80
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Three-dimensional hybrid bonding integration challenges and solutions toward multi-wafer stacking
2020
MRS Communications
L Arnaud
C. Karam
N. Bresson
C. Dubarry
S. Borel
Myriam Assous
G. Mauguen
F. Fournel
M. Gottardi
T. Mourier
S. Cheramy
F. Servant
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Citations (1)
Ferromagnetic resonance in large arrays of dipolar-coupled micro- and nanostructures
2013
Magnetism and Magnetic Materials
N. Mikuszeit
A. Marty
A. Juvenal
Jean-Philippe Michel
Bernard Viala
C. Dubarry
V. Brissoneau
Ursula Ebels
A. K. Ferchichi
C. Gourgon
N. Vukadinovic
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Low-temperature fabrication of Ba1−xSrxTiO3 thin films with good dielectric properties on platinized silicon substrates
2010
Journal of The European Ceramic Society
Xiaohong Zhu
E. Defay
B. Guigues
G. Le Rhun
C. Dubarry
M. Aïd
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Citations (11)
Thermal strain-induced dielectric anisotropy in Ba0.7Sr0.3TiO3 thin films grown on silicon-based substrates
2009
Journal of Applied Physics
Xiaohong Zhu
B. Guigues
E. Defay
C. Dubarry
M. Aïd
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Citations (6)
Low temperature perovskite crystallization of highly tunable dielectric Ba0.7Sr0.3TiO3 thick films deposited by ion beam sputtering on platinized silicon substrates
2009
Journal of Applied Physics
Xiaohong Zhu
B. Guigues
E. Defay
C. Dubarry
M. Aïd
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Citations (17)
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