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Stefan Braun

Fraunhofer Society

52

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493

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30 nm X-ray focusing correlates oscillatory stress, texture and structural defect gradients across multilayered TiN-SiOx thin film

2018 Acta Materialia
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Interface morphology of Mo/Si multilayer systems with varying Mo layer thickness studied by EUV diffuse scattering

2017 Optics Express
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Point focusing with flat and wedged crossed multilayer Laue lenses

2017 Journal of Synchrotron Radiation
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Mo/C/Si/C三元系多層Laueレンズの作製と効率測定

2017 Applied Physics Letters
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Calculated efficiencies of three-material low stress coatings for diffractive x-ray transmission optics

2016
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Optical Elements for EUV Lithography and X‐ray Optics

2015
- Stefan Braun
- Andreas Leson
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Characterization of Mo/Si mirror interface roughness for different Mo layer thickness using resonant diffuse EUV scattering

2015
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Low-stress coatings for sputtered-sliced Fresnel zone plates and multilayer Laue lenses

2015 Proceedings of SPIE
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Assembly and packaging of micro systems by using reactive bonding processes

2015 EMPC | European Microelectronics and Packaging Conference
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Full-field X-ray microscopy with crossed partial multilayer Laue lenses

2014 Optics Express
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Citations (30)