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M. Eickhoff
M. Eickhoff
Technische Universität München
Optics
Dry etching
Etching (microfabrication)
Analytical chemistry
Heterojunction
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Selective etching of AlInN/GaN heterostructures for MEMS technology
2007
Microelectronic Engineering
E. Sillero
D. López-Romero
F. Calle
M. Eickhoff
J.-F. Carlin
N. Grandjean
M. Ilegems
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Citations (13)
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