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Integrated RF-MEMS Technology with Wafer-Level Encapsulation
Integrated RF-MEMS Technology with Wafer-Level Encapsulation
2005
Kei Kuwabara
Masami Urano
Junichi Kodate
Norio Sato
Tomomi Sakata
Hiromu Ishii
Toshikazu Kamei
Kazuhisa Kudou
Masaki Yano
Katsuyuki Machida
Keywords:
Nanotechnology
Wafer
Microelectromechanical systems
Encapsulation (computer programming)
Materials science
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