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Michael W. Halpin
Michael W. Halpin
Art
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5
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Chamber sealing element
2012
Jerry Winkler
Carl White
Fred Alokozai
Todd Dunn
Eric Shero
Michael W. Halpin
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Systeme de transfert de substrat pour equipement de traitement de semi-conducteurs
1998
Ivo Raaijmakers
Loren R. Jacobs
Michael W. Halpin
James A. Alexander
Ken O'neill
Dennis L. Goodwin
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Dispositif de support pour tranches
1998
Derrick W. Foster
Robert M. Vyne
John F. Wengert
Der Jeugd Cornelius A. Van
Loren R. Jacobs
Bilsen Frank B. M. Van
Matthew G. Goodman
Glenn Hartmann
Jason M. Layton
Michael W. Halpin
Mark R. Hawkins
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Process chamber with internal support structure
1996
Derrick W. Foster
Michael W. Halpin
Mark R. Hawkins
Loren R. Jacobs
Der Jeugd Cornelius A. Van
Robert M. Vyne
John F. Wengert
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Chambre de traitement comportant un support interieur
1996
Derrick W. Foster
Michael W. Halpin
Mark R. Hawkins
Loren R. Jacobs
Der Jeugd Cornelius A. Van
Robert M. Vyne
John F. Wengert
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