Chamber sealing element

A reaction chamber includes an upper area for processing a substrate, a lower area for loading a substrate to a susceptor, which is movable within the reaction chamber, a first seal member that is positioned at a periphery of the susceptor, a second seal member, the upper between the area and the lower area is positioned, wherein the first and the second sealing member are selectively engaged with each other in order to limit the connection between the upper region and the lower region.