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Paul W. Ackmann
Paul W. Ackmann
SEMATECH
Analytical chemistry
Optics
Wafer
Physics
Spin coating
2
Papers
65
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Visualization of a gas flow instability in spin coating systems
1993
Applied Physics Letters
Sanjay Wahal
Alparslan Oztekin
David E. Bornside
Robert A. Brown
Philip K. Seidel
Paul W. Ackmann
Franz T. Geyling
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Citations (15)
The effects of gas phase convection on mass transfer in spin coating
1993
Journal of Applied Physics
David E. Bornside
Robert A. Brown
Paul W. Ackmann
John R. Frank
Anthony A. Tryba
Franz T. Geyling
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Citations (50)
1