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Anthony A. Tryba
Anthony A. Tryba
SEMATECH
Evaporation
Photolithography
Spin-½
Mass transfer coefficient
Wafer
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The effects of gas phase convection on mass transfer in spin coating
1993
Journal of Applied Physics
David E. Bornside
Robert A. Brown
Paul W. Ackmann
John R. Frank
Anthony A. Tryba
Franz T. Geyling
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