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S. Rushworth
S. Rushworth
Suffolk University
Metalorganic vapour phase epitaxy
Analytical chemistry
Equivalent oxide thickness
High-κ dielectric
Amorphous solid
2
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27
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Pulsed liquid-injection MOCVD of high-K oxides for advanced semiconductor technologies
2005
Materials Science and Engineering B-advanced Functional Solid-state Materials
C. Dubourdieu
H. Roussel
Carmen Jimenez
M. Audier
J.P. Sénateur
S. Lhostis
Laurent Auvray
F. Ducroquet
B.J. O'Sullivan
Paul K. Hurley
S. Rushworth
L. Hubert-Pfalzgraf
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Citations (27)
HfO2 films by UV-assisted and thermal injection liquid source MOCVD
2003
B.J. O'Sullivan
Paul K. Hurley
M. Modreanu
F. Roussel
H. Roussel
M. Audier
Carmen Jimenez
C. Dubourdieu
J.P. Senateur
Hywel O. Davies
S. Rushworth
Ian W. Boyd
Q. Fang
J.M. Decams
H. Guillon
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