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Seung Gi Seo
Seung Gi Seo
Yonsei University
Materials science
Atomic layer deposition
Chemical engineering
Tungsten
Thin film
6
Papers
1
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0
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2024
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Reaction Mechanisms of Non-hydrolytic Atomic Layer Deposition of Al2O3 with a Series of Alcohol Oxidants
2021
Journal of Physical Chemistry C
Seung Gi Seo
Whang Je Woo
Yujin Lee
Hwi Yoon
Miso Kim
Il Kwon Oh
Seung-min Chung
Hyungjun Kim
Bonggeun Shong
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Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors
2021
Applied Surface Science
Yujin Lee
Seung Gi Seo
Taewook Nam
Hyun Ho Lee
Hwi Yoon
Sangkyu Sun
Il Kwon Oh
Sanghun Lee
Bonggeun Shong
Jin-Hyung Seo
Jang-Hyeon Seok
Hyungjun Kim
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Atomic Layer Deposition of Titanium Silicate for Multi-Patterning Process
2021
IITC | International Interconnect Technology Conference
Sanghun Lee
Seung Gi Seo
Wontae Noh
Il Kwon Oh
Hyungjun Kim
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Comparative Study of the Growth Characteristics and Electrical Properties of Atomic-layer-deposited W Films Obtained from Newly Synthesized Metalorganic and Halide Precursor
2020
IITC | International Interconnect Technology Conference
Yujin Lee
Seung Gi Seo
Taewook Nam
Hyun Ho Lee
Hwi Yoon
Sanghun Lee
Il Kwon Oh
Hyungjun Kim
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The Precursor Adsorption Mechanism, Growth Characteristics and Electrical Properties of Plasma-Enhanced Atomic Layer Deposited Tungsten Films by Using Tungsten Chloride Precursors
2020
IITC | International Interconnect Technology Conference
Seung Gi Seo
Yujin Lee
Il Kwon Oh
Bonggeun Shong
Hwi Yoon
Sanghun Lee
Hyungjun Kim
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