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Tsuneo Yamamoto
Tsuneo Yamamoto
Phase-shift mask
Optics
Dry etching
Phase shift module
Photolithography
4
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8
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248-nm DUV MoSiON embedded phase-shifting mask for 0.25 micrometer lithography
1995
Giang T. Dao
Gang Liu
Robert F. Hainsey
Jeff Farnsworth
Yasuo Tokoro
Susumu Kawada
Tsuneo Yamamoto
Nobuyuki Yoshioka
Akira Chiba
Hiroaki Morimoto
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Attenuated phase-shift mask blanks with oxide or oxinitride of Cr or MoSi absorptive shifter
1994
Yoshihiro Saito
Susumu Kawada
Tsuneo Yamamoto
Atsushi Hayashi
Akihiko Isao
Yasuo Tokoro
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位相シフトフォトマスクブランクス製造方法、位相シフトフォトマスクブランクス、及び位相シフトフォトマスク
1994
Akira Chiba
Atsushi Hayashi
Mae Kawada
Junji Miyazaki
Yoshihiro Saito
Akihiko Toku
Tsuneo Yamamoto
Nobuyuki Yoshioka
mei tiba
nobuyuki yosioka
junzi miyazaki
tuneo yamamoto
mae kawada
akihiko toku
yosihiro saitou
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Attenuated phase-shifting mask blanks for the deep ultraviolet
1994
Yasuo Tokoro
Susumu Kawada
Tsuneo Yamamoto
Yoshihiro Saito
Atsushi Hayashi
Akihiko Isao
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