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Katayama Makoto

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Improvement in the performance of Electrostatically Controlled Linear Inchworm Actuator for DGEQ

2007
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Fabrication of Blazed Gratings by SR Exposure System

2006
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Mechanical Dynamic Gain Equalizer using MEMS Actuator Array

2006
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Compact Multichannel WDM filter module based on PLC

2006
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Fatigue characteristics of the Si moveable comb inserted into MEMS optical devices

2005
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