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Improvement in the performance of Electrostatically Controlled Linear Inchworm Actuator for DGEQ
Improvement in the performance of Electrostatically Controlled Linear Inchworm Actuator for DGEQ
2007
Maeda Takuto
Kumagaya Ikuo
Sano Tomomi
Harumoto Michiko
Katayama Makoto
Konishi Satoshi
Keywords:
Actuator
Control theory
Materials science
Correction
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