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Shao Beng Law
Shao Beng Law
GlobalFoundries
Materials science
Dielectric
Electronic engineering
Chemical-mechanical planarization
Electromigration
3
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1
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Integration of Metallization Processes in Robust Interconnects Formation for 14 nm Nodes and beyond
2018
IITC | International Interconnect Technology Conference
Nicolai Petrov
Shao Beng Law
Jonathan Rullan
Seungman Choi
San Leong Liew
Han Wah Ng
Shinichiro Kakita
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Planarity considerations in SADP for advanced BEOL patterning
2017
IITC | International Interconnect Technology Conference
James Chen
Terry A. Spooner
Jason Eugene Stephens
Shao Beng Law
Genevieve Beique
Ben Kim
Martin O'Toole
Louis Lanzerotti
Steven Leibiger
E. Todd Ryan
Shreesh Narasimha
Craig Child
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A BEOL multilevel structure with ultra low-k materials (k ≤ 2.4)
2010
IITC | International Interconnect Technology Conference
Junjing Bao
Naftali E. Lustig
Edward Engbrecht
J. Gill
Ronald G. Filippi
Tom C. Lee
Kaushik Chanda
Dimitri Kioussis
Anthony D. Lisi
Tien Cheng
Shao Beng Law
Andrew H. Simon
Philip L. Flaitz
Jihong Choi
Wei-Tsu Tseng
Eden Zielinski
Stephen M. Gates
Alfred Grill
Son Van Nguyen
Hosadurga Shobha
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