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Martin O'Toole
Martin O'Toole
GlobalFoundries
Electronic engineering
Materials science
Lithography
Multiple patterning
Capacitance
3
Papers
1
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0
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Strategy of Insertion of Merge Features in a Sea of Wires SADP Integration
2018
IITC | International Interconnect Technology Conference
James Chen
Terry A. Spooner
Lawrence A. Clevenger
Martin O'Toole
Atsushi Ogino
Louis Lanzerotti
Sean Reidy
Craig Child
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Segment removal strategy in SAQP for advanced BEOL application
2017
IITC | International Interconnect Technology Conference
James Chen
Terry A. Spooner
Jason Eugene Stephens
Martin O'Toole
Nicholas V. LiCausi
Ben Kim
Shreesh Narasimha
Craig Child
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Planarity considerations in SADP for advanced BEOL patterning
2017
IITC | International Interconnect Technology Conference
James Chen
Terry A. Spooner
Jason Eugene Stephens
Shao Beng Law
Genevieve Beique
Ben Kim
Martin O'Toole
Louis Lanzerotti
Steven Leibiger
E. Todd Ryan
Shreesh Narasimha
Craig Child
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