Old Web
English
Sign In
Acemap
>
authorDetail
>
Christopher Heung-Gyun Lee
Christopher Heung-Gyun Lee
Applied Materials
Engineering
Manufacturing engineering
Abrasive
Planarity testing
Structural engineering
3
Papers
6
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Direct Polish STI HSS CMP with Improved Planarity and Defect Performance
2012
A Iyer
T. Yang
T. Li
Jie Diao
Christopher Heung-Gyun Lee
Garlen C. Leung
T. Osterheld
Show All
Source
Cite
Save
Citations (0)
New Polish Chemistry and Process for Improved Fixed Abrasive CMP Performance
2011
Gregory E. Menk
R. Marks
Garlen C. Leung
A. Iyer
Jie Diao
Y. Zhou
Christopher Heung-Gyun Lee
Show All
Source
Cite
Save
Citations (2)
ILD0 CMP: Technology enabler for high K metal gate in high performance logic devices
2010
ASMC | Advanced Semiconductor Manufacturing Conference
Jie Diao
Garlen C. Leung
Jun Qian
Sean Cui
Anand N. Iyer
Christopher Heung-Gyun Lee
Balaji Chandrasekaran
Thomas H. Osterheld
Lakshmanan Karuppiah
Show All
Source
Cite
Save
Citations (4)
1