Old Web
English
Sign In
Acemap
>
authorDetail
>
J. Zhang
J. Zhang
RWTH Aachen University
Analytical chemistry
Nanolithography
Optics
Photolithography
Nanoimprint lithography
1
Papers
6
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Dimensional stability in step & repeat UV-nanoimprint lithography
2007
Microelectronic Engineering
M. Otto
M. Bender
J. Zhang
A. Fuchs
T. Wahlbrink
Jens Bolten
B. Spangenberg
H. Kurz
Show All
Source
Cite
Save
Citations (6)
1