Dimensional stability in step & repeat UV-nanoimprint lithography

CD control in step & repeat UV-based nanoimprint lithography was investigated to determine effects of the physical contact between the template and the resist within each imprint. Over 100 fields were printed with a single template. For each field, a specific structure was located and four selected feature sizes were analyzed with SEM. In each case, the [email protected] values were less than 9nm. Negative effects of the printing process on CD control, such as a gradual increase in feature size due to accumulation of resist residue on the template over time, could not be observed. Constant feature sizes were maintained throughout all imprints performed with UV-based nanoimprint lithography.