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Seth L. Knupp
Seth L. Knupp
IBM
Materials science
Scanning electron microscope
Analytical chemistry
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Nanotechnology
2
Papers
10
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0
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Use of 22 nm Litho SEM Non-visual Defect Data as a Process Quality Indicator
2013
IEEE Transactions on Semiconductor Manufacturing
Carol Boye
Seth L. Knupp
Rajesh Ghaskadvi
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Wafer-scale oxide fusion bonding and wafer thinning development for 3D systems integration: Oxide fusion wafer bonding and wafer thinning development for TSV-last integration
2012
Spyridon Skordas
D.C. La Tulipe
Kevin R. Winstel
Tuan Vo
Deepika Priyadarshini
A. Upham
Da Song
Alex Hubbard
R. Johnson
Kristian Cauffman
Sivananda K. Kanakasabapathy
Wei Lin
Seth L. Knupp
M. Malley
Mukta G. Farooq
Robert Hannon
Daniel George Berger
S. S. Iyer
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Citations (10)
1