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yosikawa kazuhiro
yosikawa kazuhiro
Ultrashort pulse
Optoelectronics
Etching (microfabrication)
Materials science
3
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高スループット・低コスト・シリコン貫通電極露出工程のためのスピン・高速シリコンエッチング技術の開発
2014
yosikawa kazuhiro
katagawa daisuke
watanabe naoya
aoyagi masahiro
sakai takesi
yosida taturou
oomi tadahiro
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Dispositif de gravure humide à très grande vitesse
2011
oomi tadahiro
tomo mitugu oohasi
yosikawa kazuhiro
taturou yosida
teppei utimura
kazuki soeda
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Ultrafast Wet etching equipment
2011
oomi tadahiro
tadahiro oomi
tomo mitugu oohasi
yosikawa kazuhiro
kazuhiro yosikawa
taturou yosida
teppei utimura
kazuki soeda
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