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R Longwitz
R Longwitz
Oxide
Chemical vapor deposition
Anodic bonding
Engineering
Plasma-enhanced chemical vapor deposition
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Wafer bonding of silicon wafers covered with various surface layers
2000
Sensors and Actuators A-physical
M. Wiegand
Manfred Reiche
Ulrich Gösele
K. Gutjahr
D. Stolze
R Longwitz
E. Hiller
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Citations (35)
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