Old Web
English
Sign In
Acemap
>
authorDetail
>
Lin Hu
Lin Hu
IBM
Parallel computing
Government
Experimental system
Engineering
Mechanical engineering
2
Papers
23
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Leveraging data analytics, patterning simulations and metrology models to enhance CD metrology accuracy for advanced IC nodes
2014
Proceedings of SPIE
Narender Rana
Yunlin Zhang
Taher Kagalwala
Lin Hu
Todd C. Bailey
Show All
Source
Cite
Save
Citations (0)
1