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Taher Kagalwala
Taher Kagalwala
IBM
Metrology
Electronic engineering
Architecture
Calibration
Simulation modeling
4
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18
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Leveraging data analytics, patterning simulations and metrology models to enhance CD metrology accuracy for advanced IC nodes
2014
Proceedings of SPIE
Narender Rana
Yunlin Zhang
Taher Kagalwala
Lin Hu
Todd C. Bailey
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