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Margaret B. Stern

Massachusetts Institute of Technology

22

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587

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Pompe et concentrateur thermophoretiques

2000
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Laser-fabricated glass microlens arrays.

1998 Optics Letters
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Laser micromachining of silicon: A new technique for fabricating terahertz imaging arrays

1998 Astronomical Telescopes and Instrumentation
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LASER MICROMACHINING OF SILICON: A NEW TECHNIQUE FOR FABRICATING HIGH QUALITY TERAHERTZ WAVEGUIDE COMPONENTS'

1997
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Pattern transfer for diffractive and refractive microoptics

1997 Microelectronic Engineering
- Margaret B. Stern
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Diamond grit-based field emission cathodes

1997 IEEE Electron Device Letters
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Binary optics: A VLSI-based microoptics technology

1996 Microelectronic Engineering
- Margaret B. Stern
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Profile control in dry development of high‐aspect‐ratio resist structures

1995 Journal of Vacuum Science & Technology B
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Dry etching for coherent refractive microlens arrays

1994 Optical Engineering
- Margaret B. Stern
- Theresa Rubico Jay
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Color separation by use of binary optics

1993 Optics Letters
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Citations (36)