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G. D'asti
G. D'asti
Physics
Nuclear magnetic resonance
Oxide
Chemical vapor deposition
Plasma-enhanced chemical vapor deposition
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Characterization of silicon oxide films deposited using tetraethylorthosilicate
1989
Canadian Journal of Physics
M. Simard-Normandin
I. Emesh
G. D'asti
A. C. de Wilton
N Pearce
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