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Gerald Janicke

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Sputtering with cooled target tube

2006
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Sputtering target and process / apparatus for cooling the target

2006
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Sputtering with cooler

2006
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Sputtering target with a device for cooling the target

2006
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Procede de formation d'un article revetu utilisant une (des) cible(s) de pulverisation et une (des) source(s) ionique(s) et appareil correspondant

2005
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