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Matthias Aikele
Matthias Aikele
Acceleration
Acoustics
Physics
Electronic engineering
Rotational speed
5
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A method for manufacturing isolation structures
2003
Matthias Aikele
Albert Dr.rer.nat. Engelhardt
Marcus Frey
Bernhard Hartmann
Helmut Seidel
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Capteur a structure de resonance, en particulier capteur d'acceleration ou de vitesse de rotation, et dispositif et procede d'autocontrole
1999
Josef Schalk
Erwin Stenzel
Karin Bauer
Rainer Freitag
Roland Hilser
Ralf Voss
Matthias Aikele
Helmut Seidel
Ulrich Prechtel
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Sensor with resonant structure, in particular acceleration or rotation rate sensor, as well as apparatus and method for self-testing
1999
Josef Schalk
Erwin Stenzel
Karin Bauer
Rainer Freitag
Roland Hilser
Ralf Voss
Matthias Aikele
Helmut Seidel
Ulrich Prechtel
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Sensor resonance structure, especially acceleration sensor or rotational speed as well as device and method autoprobing.
1999
Matthias Aikele
Karin Bauer
Rainer Freitag
Roland Hilser
Ulrich Prechtel
Josef Schalk
Helmut Seidel
Erwin Stenzel
Ralf Voss
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Microsensor with a resonator
1998
Helmut Seidel
Matthias Aikele
Ulrich Prechtel
Oliver Nagler
Karl Kuehl
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