Sensor resonance structure, especially acceleration sensor or rotational speed as well as device and method autoprobing.
1999
Sensor with a structure capable of vibration (2a, 2b; 11; 100) for detecting a measured variable by a first periodic vibration of the structure (2a, 2b; 11; 100); an element (5; 15; 25) for generating an output signal dependent on the measured variable, and means (41, 45; 60a, 60b) for detecting and / or removing a portion of test signal output signal , which it is generated by a second periodic vibration, overlying the first vibration of the structure (2a, 2b; 11; 100), characterized by an actuator unit (3a, 3b; 7) for exciting the structure (2a, 2b; 11; 100) and producing the first periodic oscillation and means (3a, 3b, 33a, 33b; 7, 50, 51) for exciting the structure (2a, 2b; 11; 100) in a second vibration mode, which overlies the first vibration mode used to detect the measured variable.
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