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Makiko Kageyama
Makiko Kageyama
Optics
Electronic engineering
Resonator
Microelectromechanical systems
Tuning fork
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Si MEMS disk resonator supported by double-ended tuning fork absorbers
2014
FCS | International Frequency Control Symposium
Takahiro Ohtsuka
Makiko Kageyama
Yu Iwai
Akihiko Tashiro
Atsushi Kamijo
Noritoshi Kimura
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