Si MEMS disk resonator supported by double-ended tuning fork absorbers

Compound (2,1)-mode Silicon (Si) disk resonators with double ended tuning fork (DETF) absorbers connected to anchors have been proposed to reduce the vibration energy leak into the Si substrate through anchors. The optimal dimensions of DETF absorber was evaluated by minimizing strain energy calculated from FEM. Si disk resonators with and without the DETF absorbers were fabricated by means of surface MEMS (Micro-Electro-Mechanical System) process. The resonator with optimal DETF absorber exhibits Q ≥ 170,000, whereas Q = 80,000 for the reference one.