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Michio Sunagawa
Michio Sunagawa
Analytical chemistry
Sputter deposition
Thin film
Tantalum pentoxide
Chemistry
2
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Physical Properties of Tantalum Pentoxide Thin Film Fbricated by RF-Magnetron Sputtering Method
1997
Shinku
Tomosumi Kamimura
Hazime Kanou
Kanyoshi Ochi
Kunio Yoshida
H. Yoshida
Hisanori Fujita
Shigeharu Tamura
Fumio Tani
Michio Sunagawa
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The influence of magnetic plugging on RF plasma density
1996
Japanese Journal of Applied Physics
Kimihiro Nishimura
Yasushi Yoshino
Atsuo Sawara
Tadayuki Ohta
Michio Sunagawa
Takashi Ohzone
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