Old Web
English
Sign In
Acemap
>
authorDetail
>
J. Gelatos
J. Gelatos
Applied Materials
Electrical resistivity and conductivity
Electronic engineering
Annealing (metallurgy)
Laser
Engineering
5
Papers
9
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (5)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
PMOS contact resistance solution compatible to CMOS integration for 7 nm node and beyond
2016
VLSIT | Symposium on VLSI Technology
Chi-Nung Ni
Yi-Chiau Huang
S. Jun
Shiyu Sun
Anshul A. Vyas
Fareen Adeni Khaja
K.V. Rao
Shashank Sharma
Nicolas Breil
Miao Jin
Christopher Lazik
Abhilash J. Mayur
J. Gelatos
Hua Chung
Raymond Hung
M. Chudzik
Naomi Yoshida
Nam Sung Kim
Show All
Source
Cite
Save
Citations (5)
Selenium segregation optimization for 10 nm node contact resistivity
2014
VLSIT | Symposium on VLSI Technology
Chi-Nung Ni
K.V. Rao
Fareen Adeni Khaja
Shashank Sharma
B. Zheng
J. Ramalingam
J. Gelatos
J. Lei
Chorng-Ping Chang
Abhilash J. Mayur
Naushad Variam
Raymond Hung
Adam Brand
Show All
Source
Cite
Save
Citations (0)
Damage engineered Se implant for NMOS TiSi x contact resistivity reduction
2014
K.V. Rao
Fareen Adeni Khaja
Chi-Nung Ni
Shashank Sharma
B. Zheng
J. Ramalingam
J. Gelatos
J. Lei
Abhilash J. Mayur
Raymond Hung
V. Banthia
Adam Brand
Naushad Variam
Show All
Source
Cite
Save
Citations (0)
Laser anneal assisted contact resistivity reduction with post-silicide implantation for 14nm node and beyond
2013
VLSIT | Symposium on VLSI Technology
Chi-Nung Ni
K.V. Rao
Fareen Adeni Khaja
Shashank Sharma
B. Zheng
J. Ramalingam
J. Gelatos
J. Lei
Shankar Muthukrishnan
Raymond Hung
Chorng-Ping Chang
Naushad Variam
Adam Brand
Show All
Source
Cite
Save
Citations (1)
Cu Resistivity Scaling Limits for 20nm Copper Damascene Lines
2007
IITC | International Interconnect Technology Conference
J. Van Olmen
S. List
Zsolt Tokei
L. Carbonell
Sywert Brongersma
Henny Volders
Eddy Kunnen
Nancy Heylen
Ivan Ciofi
A. Khandelwal
J. Gelatos
T. Mandrekar
P. Boelen
Show All
Source
Cite
Save
Citations (3)
1