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Xinyu Zhang
Xinyu Zhang
Applied Materials
Sputtering
Electromagnetic coil
Sputter deposition
Chemical vapor deposition
Thin film
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2024
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Process development of 50-ÃIMP Ti with <2% thickness uniformity for 300-mm iLB
2000
Xinyu Zhang
Ian A. Pancham
Anthony Chan
Mani Subamani
John C. Forster
Jim von Gogh
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