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Yuichi Kawano
Yuichi Kawano
Mitsubishi Heavy Industries
Dielectric
Thermal stability
Magnetoresistive random-access memory
Analytical chemistry
Physics
3
Papers
20
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0
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Analysis of Sidewall Damage Layer in Low-k Film Using the Interline Dielectric Capacitance Measurements
2011
Japanese Journal of Applied Physics
Takahisa Furuhashi
N. Nakanishi
Masahiro Matsumoto
Shigenori Kido
Masakazu Okada
Yuichi Kawano
Yukinori Hirose
Masahiko Fujisawa
Koyu Asai
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Improvement of Thermal Stability of Magnetoresistive Random Access Memory Device with SiN Protective Film Deposited by High-Density Plasma Chemical Vapor Deposition
2008
Japanese Journal of Applied Physics
Katsumi Suemitsu
Yuichi Kawano
Hiroaki Utsumi
Hiroaki Honjo
Ryusuke Nebashi
Shinsaku Saito
Norikazu Ohshima
Tadahiko Sugibayashi
Hiromitsu Hada
T. Nohisa
Tadashi Shimazu
Masahiko Inoue
Naoki Kasai
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Citations (20)
Improvement of Thermal Stability of MRAM Device with SiN Protective Film Deposited by HDP CVD
2007
The Japan Society of Applied Physics
Katsumi Suemitsu
Yuichi Kawano
Hiroaki Utsumi
Hiroaki Honjo
Ryusuke Nebashi
Shinsaku Saito
Norikazu Ohshima
Tadahiko Sugibayashi
Hiromitsu Hada
T. Nohisa
Tadashi Shimazu
Masahiko Inoue
Naoki Kasai
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