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Toshihito Tsuga
Toshihito Tsuga
Wafer
Optoelectronics
Vacancy defect
surface
Materials science
1
Papers
2
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Influence of Vacancy in Silicon Wafer of Various Types on Surface Microroughness in Wet Chemical Process
1992
IEICE Transactions on Electronics
Tadahiro Ohmi
Toshihito Tsuga
J Takano
Masahiko Kogure
K. Makihara
Takayuki Imaoka
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